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Device level
Can be static, dynamic and transient and frequency domain under different types, static electricity, machinery, hot - machine - electrically coupled fluid-solid interaction and analysis.
Technology level
Combination of materials, layout and process flow, create components of 3 d virtual model, output to the TEM module are analyzed.
System level
Applied to many fields of multi-scale MEMS and nanotechnology system level design tool, is effective for CMOS - MEMS devices, integrated circuit design...
Modeling tools
Senior landscape design tools are: edit module, the design rule checking tools, 3 d modeling module and meshing tools.
IntelliSuite软件
Function introduction: it can be used for thermal, electrostatic, mechanical, thermal-mechanic-electric coupling, fluid-solid coupling analysis under different types of static, dynamic, transient and frequency domain.
Functions： Customizable parametric analysis tools, to generate an analysis report from layout generation,
Functions： 3D full-wave electromagnetic field analysis module
Functions： A module used for analyzing microfluidics and microscopic phenomena in BioMEMS field.
IntelliSense company launched in the 1990 s professional IntelliSuite MEMS design software, for the customer to do all kinds of MEMS devices are designed and developed, including the layout design, process simulation, device level more than physical field coupling analysis, and system level MEMS - IC joint simulation. Our professional MEMS design software with a strong...。 MORE>>
Custom development services
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MEMS Process Simulation Tool - FabViewer (Free Trial)FabViewer is one of the powerful MEMS process simulation tools in IntelliSuite software package. It can display process steps in the form of animation, and the fine structure inside the 3D device can - Micro/nano device customized development services 2021-01-08
Micro-nano devices processing services
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Micro-nano devices processing services
Wet etching technology for high aspect ratio microstructures on quart and gives some possible applications
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