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IntelliSute software

Process Modeling

RECIPE

Number of views:

1000

RECIPE

Simulate the RIE/ICP (Bosch Process) process to clearly reflect how the processing process affects the product formation. ◆ Adjustable side scallops, roughness and period; ◆ The lag effect of RIE and DRIE; ◆ Simulate the shape and side angle of the final entity; ◆ Consider the effect of mask; ◆ Create structures with adjustable process parameters for specific sections; ◆ Support Footing effect simulation; ◆ Support process parameter calculation; ◆ DRIE etching rate and aspect ratio calibration tool;

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Number of views:

1000

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Simulate the RIE/ICP (Bosch Process) process to clearly reflect how the processing process affects the product formation.

◆ Adjustable side scallops, roughness and cycle;

◆ The lag effect of RIE and DRIE;

◆ Simulate the shape and side angle of the final entity;

◆ Consider the mask effect;

◆ Create structures with adjustable process parameters for specific sections;

◆ Support Footing effect simulation;

◆ Support process parameter calculation;

◆ DRIE etching rate and aspect ratio calibration tool;

ARDE

Micro-loading

various combinations of ARDE and microloading effect simulations

MEMaterial

None

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