CATEGROIES
SME (System model extraction)
The innovative SME (System Model Extraction) can systematically analyze the dynamic characteristics of MEMS devices, extract device characteristic parameters, convert a large FEA model into an accurate N-DOF energy model, import it into the SYNPLE module for simulation, and finally Obtain results consistent with full FEA analysis while computing 1000 times faster;
IntelliSuite uses state-of-the-art model reduction techniques to automatically create compact system models from large finite element models. NDOF (N-degree-of-freedom) system models encompass coupledelectro-mechanical behavior including stress stiffening, electrostatic softening, packaging effects, fluidic and other sources of damping. These accurate compact models can be exported to VHDL, Verilog-A, SPICE,Matlab and other tools for full MEMS-ASIC co-simulation.
System Model Extraction (SME)


Schematic of A Single Mirror


Schematic of Mirror Array


MEMS Mirror TEM


System Schematic Design


3D View of Performance


System Analysis
Displacement delays of the mirrors on the matrix diagonal



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