The 3D grayscale lithography process enables customization and optimization of grayscale masks during the process simulation stage in Intellisuite and the ability to view and analyze the resulting 3D structures, which will also allow designers to be more innovative with their initial ideas, and More time and resources can be saved for designers.

Layout for testing

Simulation result Simulation result

01. Grayscale mask graphics generation 

Create Grayscale Mask Patterns in BluePrint

1. Create a new layer,

2. From the Tools menu, select Script Editor,

3. Fill in the script,

4. Click Run to generate the mask.

02. 3D exposure

Creating 3D Exposures in IntelliFab

1. Select Exposure->UV->3D->Gray-sacle in the database,

2. Select mask_no in the parameters (please note that all patterns in this layer are considered grayscale mask patterns),

3. Save the file and simulate in FabSim.

3D exposure                              selection layer in database

Simulation Results                                             Simulation Results Side View