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Exposure Photoetching Simulation Module
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Number of views:
1000

Exposure Photoetching Simulation Module

Simulate MEMS thick-film physical lithography process, and adopt physical simulation algorithms and fine reaction SU8 of physical models and other thick-film lithography effect.
Number of views:
1000
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Exposure (Lithography module)

·Deep resist/SU8 simulator

·Dynamic 3D CA models

·Integrated simulation of:

·Exposure

·Post exposure bake

·Develop

·Material databases

 

江苏英特神斯科技有限公司

 

Exposure

 

江苏英特神斯科技有限公司

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Simulate MEMS thick-film physical lithography process, and adopt physical simulation algorithms and fine reaction SU8 of physical models and other thick-film lithography effect.

One-stop MEMS

Custom development services
Micro-nano devices processing services

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