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RECIPE Dry-etching Module
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RECIPE — dry etch simulation
Feature highlights
• RIE, ICP, Bosch etch simulation
• Predict final dimension and shape
• Sidewall angle, roughness simulation
• RIE lag simulation
• RIE notching and pinchoff simulation
• Multi-etch capability
• Process deviation studies
Real world simulation capability
Dry Etching Simulator- RECIPE
Dry Etching Simulator- RECIPE
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